Announcement of Exhibiting at SEMICON EUROPA 2026

We will exhibit our booth at “SEMICON EUROPA 2026” at Messe München in Munich, Germany, from November 10 to November 13, 2026.

There will be updated information on our Lithography Technologies (full-field projection aligners).
We will collaborate with TELTEC International GmbH for this exhibition, and our booth will be located within TELTEC’s booth.

Please visit our booth—we look forward to seeing you there!

▶SEMICON EUROPA 2026 Official URL: Home | SEMICON Europa

Exhibit Details Large-Area Projection Lithography System; UX-4, UX-5 series
Non-contact and large shot-size, capable of high productivity.

Our lithography tools utilize USHIO’s robust lighting and optical technologies, as well as our unique large-area projection lens technology.
・UX-4 can process up to 8-inch wafers with non-contact handling and one-shot per wafer. By enabling exposure on warped wafers with an enhanced depth of focus, it offers higher productivity and better yield than proximity aligners.
・We have also released a new full-field projection aligner UV LED light source, UX-45114SCB. It is eco-friendly and cost-effective for users. Please visit our booth to check the details.
(Related article)
→Orders Now Open for the New Product “UX-45114SC” of the UX-4 Series, Full Field Projection Aligner for Wafers | Mask aligner UX-4 Series (Full Field Projection) | Ushio Inc.

Key Technologies

【Key Technologies】
•Equipped with the world's leading high-pressure UV lampp
（An eco-friendly and cost-effective UV-LED light source is also selectable.）
•Unique illumination optical system boasting high uniformity
•Outstanding large-area projection lens
•Large depth of focus for stable patterning
•Larg shot enables high productivity