SEMICON WEST 2026
We will exhibit our booth at "SEMICON West 2026" Moscone Center in San Francisco, California from October 13th to October 15th, 2026.
There will be updated information on our Lithography Technologies (Panel-level Stepper, Full-field Projection Aligner and Interference Lithography Tool). So please visit our booth! We are looking forward to seeing you there!
▶SEMICON West 2026 Official URL: Home | SEMICON West
Ushio Booth| Open period | October 13(Tue.) to October 15(Thu.), 2026. |
| Venue | Moscone Center | San Francisco, CA |
| Booth No. | #752 |
| Official URL | https://www.semiconwest.org/ |
Exhibit Details
Large-Area Projection Lithography System; UX-4, UX-5 series
Non-contact and large shot-size, capable of high productivity.
The lithography tools utilize Ushio's robust lighting and optical technologies, along with unique large-area projection lens technology.
・The UX-4 is capable of processing up to 8-inch wafers with non-contact and one shot per wafer. Enabling exposure on warped wafers using a greater depth of focus, which achieves higher productivity and better yield than proximity aligners.
・The UX-5 is designed as a stepper projection lithography tool for advanced packaging substrates, which is capable of exposing full-size (510x515mm) substrates with 4 shots. You will be able to learn latest stepper lithography tool for advanced packaging that achieves a resolution of L/S=1.5µm with exposure field of 100mm squared or more per shot. Please visit our booth and get in touch with our staff for more details.
Key Technologies
【Key Technologies】
•Equipped with the world's leading high-pressure UV lamp
•Unique illumination optical system boasting high uniformity
•Outstanding large-area projection lens
•Large depth of focus for stable patterning
•Larg shot enables high productivity
For further information,
please contact
Ushio Inc. Corporate
Communication Department
- TEL：+81-3-5657-1017
FAX：+81-3-5657-1020
- contact@ushio.co.jp