Lineups
For φ4/6/8inch Standard products (Portfolio)
Products (Portfolio) are for φ4-8 inches. USHIO has other various lineups which are not in the list below.
| UX-44101SC | UX-4423SC | UX-4477SC | UX-45114SC | |
|---|---|---|---|---|
| Wafer size | 4inch | 6inch | 6inch/8inch | 6inch/8inch |
| Exposure area | φ100mm | φ150mm | φ200mm | φ200mm |
| Resolution | 2µm | 9µm | 4µm | 2.8µm |
| Depth of Focus | ±10µm | ±50µm | ±30µm | ±10µm * |
| Overlay accuracy (TSA) |
±1.0µm | ±1.0µm | ±1.0µm | ±0.8µm |
| Overlay accuracy (BSA) |
±1.5µm | ±1.5µm | ±1.5µm | ±1.0µm |
| Wavelength | i | ihg | i | i |
| First guaranteed intensity | 150mW/cm² (@UVD365PD) |
65mW/cm² (@UVD-405PD) |
70mW/cm² (@UVD-365PD) |
40mW/cm² (@UVD-365PD) |
| Tact | 120WPH～(not including the time for exposure time) | |||
*Either "Resolution 2.8 μm, DOF ±10 μm" or "Resolution 3 μm, DOF ±20 μm" can be selected as the combination of resolution and DOF by filter selection.
Key Benefits
- - Optics experts: Lamp house, lense, optical system design, all made in house
- - No mask contact and Full field projection> High Productivity
- - Large Depth of Focus
- - High Flexlibility on wafer formats
- - OHT system compatibility (Industry-first as full field aligner)
SEM Images
- - No mask contact &Full field projection > High Productivity
- - Large Depth of Focus
- - Hight Flexibility on wafer formats
