Demo
Demonstration is available. We also accommodate offsite experiments*.
For visitors, the demonstration will be conducted at Ushio Inc.'s Gotemba facility in Japan.
- * Offsite experiments > Customers can send wafers to USHIO without traveling to Japan.
USHIO INC.
Gotemba Division
（Japan）
Address
Access
Access by rail
Take the JR Gotemba Line to Gotemba Station or the JR Tokaido Main Line to Mishima station, and then go by taxi.
Access by car from Ebina
Take the Tomei Expressway, exiting at the Gotemba interchange toward Japan National Route 138 and turn left at the “Ishibashi” signal. Turn left at the “Hagiwara kita” signal onto Japan National Route 246. At the “Yabai” signal, turn right and enter the Komakado Industrial Park.
Access by car from Fujikawa
Take the Tomei Expressway, exiting at the Susono interchange and go straight on Japan National Route 82. Turn left at the “Susono IC Iriguchi” signal onto Japan National Route 246. Turn left at the “Komakado Kazeana” signal and enter the Komakado Industrial Park.
Facilities and items for demo
| Facilities | |
|---|---|
| Coater | ― |
| Exposure tool | check |
| Developer | check |
| Microscope | check |
| SEM | check |
| Hot plate/Oven | check |
| Items for evaluation | |
|---|---|
| Resolution | check |
| Overlay | check |
| Transfer/Vacuuming | check |
| Alignment mark | check |
| visibility | check |